Content
X-ray digital CCD camera
Experimental results
Applications
Highly Sensitive Fast CCD Camera
The CCD camera is a device specially developed for the imaging of objects in X-ray and electron beams with high resolution.
Parameters
- Fast readout rate up to 40 Mpixels/s.
- Standard Camera Link TM.
- Dynamic range: 1000:1.
- Total readout noise: 23 electrons at 5 MHz.
- Max. usable signal: 23,000 electrons/pixel.
- Peltier cooled system.
- More technical specification ...
Imaging system based on the camera and the Crytur thin YAG:Ce imaging screen creates imaging system with very high spatial resolution with great features:
- High spatial resolution down to 1 micron.
- Long operation life of the imaging system.
- X-ray, electron and UV detection with the same system.
- Complete system solution and supply.
Results
The high resolution of the imaging system was proved by means of an 8-micron golden wire grid and a chromium grid layer with gaps of 2-4.5 microns.
The images were taken using a Cu anode tube X-ray source at 40kV.
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| 8 microns golden mesh (X-ray). | SEM image of the mesh. |
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| The golden mesh taken by using YAG:Ce based imaging system. |
The golden mesh taken by using P43 phosphor screen. |
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| SEM image of chromium grid. | Chromium grid in X-ray. |
Comparing the results with images taken by using standard powder phosphor imaging screens it can be seen that the resolution of YAG:Ce (LuAG:Ce) thin screens is very high.
Published results can be found in the Download section:
- Poster on Lumdetr 2006 (in pdf file).
- Poster on EXRS 2006 (in pdf file).
Application
The imaging system can be used in many applications where very small details of imaged object should be observed:
- Biology and medical - Small biological objects inner details imaging.
- Electronics - Integrated circuits inspection.
- Industrial - X-ray inspection of higly detailed parts.
- Physics - Beam location and inspection
- X-ray semiconductor metrology
- X-ray spectroscopy
The images were taken using a Cu anode tube X-ray source at 40kV.
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| Termite head. | Drosophila. |
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| A tick. | Tick in high resolution. |