REBEKA™ - retractable BSE detector for SEM

REBEKA™ - retractable BSE detector for SEM
Rebeka™ represents a new retractable BSE detector for electron microscopy which combines the best available single crystal scintillators manufactured in Crytur with precise high vacuum mechanics and readout electronics in one ready-to-use package.

Key properties

RELIABLE SENSOR PRECISE MECHANICS
  • Single crystal sensor

  • Scintillator/PMT principle for ultimate image quality

  • Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV

  • Excellent S/N ratio

  • Unlimited sensor lifetime

  • HV + LV + ESEM operation

  • Motorized retraction mechanism

  • Bellows-sealed high vacuum system

  • Retraction 150 mm

  • Compact design

  • Precise alignment

  • Customized connection to SEM

Technical parameters

  • SENSOR UNIT

single crystal scintillator with optimized efficiency and minimized afterglow, exponential decay time 45 ns with 30 photons/keV

Outer diameter 15 mm

Inner hole diameter 3 / 2 / 1.5 or 1 mm. This dimension limits the field of view

Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV

Sensitivity down to 1pA beam current

Thin - allows a working distance down to 2 mm

 

  • MECHANICAL UNIT

 

Dimensions 406 x 100 x 72 mm

Bellows design for ultimate vacuum

150 mm motorized retraction

+/- 2 mm fine adjustment in x, y, z axis

0.01 mm repeatability

Flange adapted to customer's SEM

Silver / black / blue / red matt surface finish available

 

  • ELECTRONICS CONTROL UNIT

Dimensions 270 x 180 x 65 mm

Supply 230/110 V

3 noise filters optimized for different scanning speeds

50 MHz bandwidth

Internal source 0-1200 V for PMT HV

Output video signal -1/+1V (-5/+5V)

Full remote software control

DC offset up to -20V

Sample images

 

  • Sensitivity at low energies:
  • Contrast evolution

Evolution of BSE contrast with increasing landing energy

Sample: Chondrules and metal flakes in Ghubara Meteorite, provided by Institute of Geology CAS 

  • Fast scanning speed

Rebeka can operate in a fast scanning speed down to 20 ns / pxl.

Sample: Er / Yb fiber laser - detail, provided by Institute of Photonics and Electronics

  • BSE and SE image comparison of the same sample

Sample: Lu3Al5O12 with Lu2O3 crystals

  • IMAGES ACQUIRED WITH REBEKA

Sample: Ir crystals on ceramic surface

Sample: Sn bond on electronic chip

 

Sample: Natural garnet crystal

 

Sample: Hg - Pd - Te provided by Czech geological survey